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Microstructure of epitaxial scandium nitride films grown on silicon
M.A. Moram, T.B. Joyce, P.R. Chalker, Z.H. Barber, C.J. HumphreysVolume:
252
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.apsusc.2005.11.069
File:
PDF, 114 KB
english, 2006