Transmission electron microscopy studies of HfO2 thin films grown by chloride-based atomic layer deposition
D.R.G. Mitchell, A. Aidla, J. AarikVolume:
253
Year:
2006
Language:
english
Pages:
12
DOI:
10.1016/j.apsusc.2005.12.133
File:
PDF, 1.97 MB
english, 2006