On the use of response surface methodology to predict and interpret the preferred c-axis orientation of sputtered AlN thin films
J. Adamczyk, N. Horny, A. Tricoteaux, P.-Y. Jouan, M. ZadamVolume:
254
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2007.07.139
File:
PDF, 627 KB
english, 2008