The effect of ambipolar electric fields on the electron...

Plasma Sources Science and Technology 2015 / 02 Vol. 24; Iss. 1

The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

Schulze, J, Donkó, Z, Derzsi, A, Korolov, I, Schuengel, E
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Volume:
24
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/24/1/015019
Date:
February, 2015
File:
PDF, 3.24 MB
english, 2015
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