Al2O3/SiO2 films prepared by electron-beam evaporation as...

Al2O3/SiO2 films prepared by electron-beam evaporation as UV antireflection coatings on 4H-SiC

Feng Zhang, Huili Zhu, Weifeng Yang, Zhengyun Wu, Hongji Qi, Hongbo He, Zhengxiu Fan, Jianda Shao
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Volume:
254
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2007.10.052
File:
PDF, 205 KB
english, 2008
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