Appearance of local strain fields and high electrical conductivity of macro-defects in P+-implanted 4H-SiC
Ishiji, K., Kawado, S., Hirai, Y., Nagamachi, S.Volume:
113
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4807158
File:
PDF, 3.16 MB
english, 2013