Molecular dynamics and experimental studies on deposition...

Applied Surface Science 2008 Vol. 254; Iss. 11

Molecular dynamics and experimental studies on deposition mechanisms of ion beam sputtering

Te-Hua Fang, Win-Jin Chang, Chao-Ming Lin, Wen-Chieh Lien
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Volume:
254
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2007.11.054
File:
PDF, 1.16 MB
english, 2008
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