Ionization probability of sputtered particles as a function of their energy: Part II. Positive Si+ ions
Y. Kudriavtsev, S. Gallardo, A. Villegas, G. Ramirez, R. AsomozaVolume:
254
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2007.12.001
File:
PDF, 480 KB
english, 2008