Passivation of GaAs surface by atomic-layer-deposited titanium nitride
M. Bosund, A. Aierken, J. Tiilikainen, T. Hakkarainen, H. LipsanenVolume:
254
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2008.02.070
File:
PDF, 793 KB
english, 2008