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Low temperature selective epitaxial growth of SiGe layers using various dielectric mask patterns and process conditions
A-Ram Choi, Sang-Sik Choi, Jin-Tae Kim, Deok-Ho Cho, Tae-Hyun Han, Kyu-Hwan ShimVolume:
254
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2008.02.195
File:
PDF, 732 KB
english, 2008