Characteristics of Si-doped Sb2Te3 thin films for...

Applied Surface Science 2008 Vol. 254; Iss. 17

Characteristics of Si-doped Sb2Te3 thin films for phase-change random access memory

Yin Zhang, Jie Feng, Zufa Zhang, Bingchu Cai, Yinyin Lin, Ting’ao Tang, Bomy Chen
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Volume:
254
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2008.03.006
File:
PDF, 618 KB
english, 2008
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