Optimization of plasma parameters for high rate deposition...

Optimization of plasma parameters for high rate deposition of titanium nitride films as protective coating on bell-metal by reactive sputtering in cylindrical magnetron device

Sankar Moni Borah, Arup Ratan Pal, Heremba Bailung, Joyanti Chutia
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
254
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.03.047
File:
PDF, 394 KB
english, 2008
Conversion to is in progress
Conversion to is failed