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Optimization of plasma parameters for high rate deposition of titanium nitride films as protective coating on bell-metal by reactive sputtering in cylindrical magnetron device
Sankar Moni Borah, Arup Ratan Pal, Heremba Bailung, Joyanti ChutiaVolume:
254
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.03.047
File:
PDF, 394 KB
english, 2008