Substrate heating effects in CO2 laser annealing of...

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Substrate heating effects in CO2 laser annealing of ion-implanted silicon

M. Blomberg, K. Naukkarinen, T. Tuomi, V. Airaksinen, M. Luomajärvi, E. Rauhala
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Year:
1983
Language:
english
DOI:
10.1063/1.332343
File:
PDF, 418 KB
english, 1983
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