Substrate heating effects in CO2 laser annealing of ion-implanted silicon
M. Blomberg, K. Naukkarinen, T. Tuomi, V. Airaksinen, M. Luomajärvi, E. RauhalaYear:
1983
Language:
english
DOI:
10.1063/1.332343
File:
PDF, 418 KB
english, 1983