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Modifying the properties of fluorinated amorphous films using argon by filtered cathodic vacuum arc
Yu-Hung Lin, Yang-Chih Syue, Hong-Da Lin, Uei-Shin Chen, Yee-Shyi Chang, Jiann-Ruey Chen, Han C. ShihVolume:
255
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.07.084
File:
PDF, 577 KB
english, 2008