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Investigation of local order of a-SiN:H films deposited by hot wire chemical vapour deposition (HWCVD)
Bibhu P. Swain, Bhabani S. Swain, Nong M. HwangVolume:
255
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.07.151
File:
PDF, 787 KB
english, 2008