Hydrogenation during thermal nitridation of silicon dioxide

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Hydrogenation during thermal nitridation of silicon dioxide

A. E. T. Kuiper, M. F. C. Willemsen, A. M. L. Theunissen, W. M. Van De Wijgert, F. H. P. M. Habraken, R. H. G. Tijhaar, W. F. Van Der Weg, J. T. Chen
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Year:
1986
Language:
english
DOI:
10.1063/1.336985
File:
PDF, 837 KB
english, 1986
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