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Influence of oxygen plasma treatment on boron carbon nitride film composition
Hidemitsu Aoki, Takuro Masuzumi, Daisuke Watanabe, M.K. Mazumder, Hiroshi Sota, Chiharu Kimura, Takashi SuginoVolume:
255
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.10.045
File:
PDF, 620 KB
english, 2009