In situ functionalized self-assembled monolayer surfaces...

Applied Surface Science 2009 Vol. 255; Iss. 6

In situ functionalized self-assembled monolayer surfaces for selective chemical vapor deposition of copper

Xin Liu, Qi Wang, Liu-Ping Chen
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Volume:
255
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.10.051
File:
PDF, 797 KB
english, 2009
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