Development of microcracks in hydrogen-implanted silicon substrates
Penot, Jean-Daniel, Massy, Damien, Rieutord, François, Mazen, Frederic, Reboh, Shay, Madeira, Florence, Capello, Luciana, Landru, Didier, Kononchuk, OlegVolume:
114
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4821239
File:
PDF, 777 KB
english, 2013