Picosecond pulsed laser ablation and micromachining of 4H-SiC wafers
Pal Molian, Ben Pecholt, Saurabh GuptaVolume:
255
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.11.071
File:
PDF, 1.22 MB
english, 2009