Influence of substoichiometer on the laser-induced damage...

Applied Surface Science 2009 Vol. 255; Iss. 8

Influence of substoichiometer on the laser-induced damage characters of HfO2 thin films

Dongping Zhang, Congjuan Wang, Ping Fan, Xingmin Cai, Guangxing Liang, Jianda Shao, Zhengxiu Fan
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Volume:
255
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.12.006
File:
PDF, 357 KB
english, 2009
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