Room-temperature deposition of transparent conducting...

Applied Surface Science 2009 Vol. 255; Iss. 11

Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method

Weifeng Yang, Zhuguang Liu, Dong-Liang Peng, Feng Zhang, Huolin Huang, Yannan Xie, Zhengyun Wu
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Volume:
255
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2008.12.021
File:
PDF, 1.07 MB
english, 2009
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