Patterning on single crystalline silicon by laser scanning...

Applied Surface Science 2009 Vol. 255; Iss. 15

Patterning on single crystalline silicon by laser scanning and alkaline etching

Takashi Hosono, Hitoshi Tokura
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Volume:
255
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2009.03.005
File:
PDF, 530 KB
english, 2009
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