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Numerical modeling of ultrashort-pulse laser ablation of silicon
D.P. Korfiatis, K.-A. Th. Thoma, J.C. VardaxoglouVolume:
255
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2009.04.036
File:
PDF, 263 KB
english, 2009