Evolution of sputtered tungsten coatings at high...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2013 Vol. 31; Iss. 6

Evolution of sputtered tungsten coatings at high temperature

Stelmakh, Veronika, Rinnerbauer, Veronika, Joannopoulos, John D., Soljačić, Marin, Celanovic, Ivan, Senkevich, Jay J., Tucker, Charles, Ives, Thomas, Shrader, Ronney
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4817813
File:
PDF, 1.48 MB
english, 2013
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