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Vibrational spectroscopy characterization of magnetron sputtered silicon oxide and silicon oxynitride films
V. Godinho, V.N. Denisov, B.N. Mavrin, N.N. Novikova, E.A. Vinogradov, V.A. Yakovlev, C. Fernández-Ramos, M.C. Jiménez de Haro, A. FernándezVolume:
256
Year:
2009
Language:
english
Pages:
9
DOI:
10.1016/j.apsusc.2009.07.101
File:
PDF, 703 KB
english, 2009