Vibrational spectroscopy characterization of magnetron...

Vibrational spectroscopy characterization of magnetron sputtered silicon oxide and silicon oxynitride films

V. Godinho, V.N. Denisov, B.N. Mavrin, N.N. Novikova, E.A. Vinogradov, V.A. Yakovlev, C. Fernández-Ramos, M.C. Jiménez de Haro, A. Fernández
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Volume:
256
Year:
2009
Language:
english
Pages:
9
DOI:
10.1016/j.apsusc.2009.07.101
File:
PDF, 703 KB
english, 2009
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