UV excimer laser drilled high aspect ratio submicron via...

Applied Surface Science 2009 Vol. 256; Iss. 1

UV excimer laser drilled high aspect ratio submicron via hole

K.H. Chen, Wenhsing Wu, Byung Hwan Chu, C.Y. Chang, Jenshan Lin, S.J. Pearton, D.P. Norton, F. Ren
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
256
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2009.07.105
File:
PDF, 316 KB
english, 2009
Conversion to is in progress
Conversion to is failed