Improvement of depth resolution in XPS analysis of...

Applied Surface Science 2009 Vol. 256; Iss. 5

Improvement of depth resolution in XPS analysis of fluorinated layer using C60 ion sputtering

Takuya Nobuta, Toshio Ogawa
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Volume:
256
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2009.09.022
File:
PDF, 650 KB
english, 2009
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