Effect of nitrogen content on phase configuration,...

Effect of nitrogen content on phase configuration, nanostructure and mechanical behaviors in magnetron sputtered SiCxNy thin films

J.P. Wang, Y.H. Lu, Y.G. Shen
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Volume:
256
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2009.10.044
File:
PDF, 787 KB
english, 2010
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