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Direct experimental evidence for monosilane formation after proton or deuteron implantation of crystalline silicon
Tatarkiewicz, Jakub, Król, AndrzejVolume:
32
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.32.8401
Date:
December, 1985
File:
PDF, 166 KB
english, 1985