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Strain relaxation in nano-patterned strained-Si/SiGe heterostructure on insulator
XuYan Liu, WeiLi Liu, XiaoBo Ma, ShiLong Lv, ZhiTang Song, ChengLu LinVolume:
256
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2009.12.063
File:
PDF, 364 KB
english, 2010