Effect of Carrier Gas (Ar and He) on the Crystallographic Quality of Networked Nanographite Grown on Si Substrates by Photoemission-Assisted Plasma-Enhanced Chemical Vapor Deposition
Sumi, Haruki, Ogawa, Shuichi, Sato, Motonobu, Saikubo, Akihiko, Ikenaga, Eiji, Nihei, Mizuhisa, Takakuwa, YujiVolume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.076201
Date:
July, 2010
File:
PDF, 793 KB
english, 2010