Laser smoothing of sub-micron grooves in hydroxyl-rich...

Laser smoothing of sub-micron grooves in hydroxyl-rich fused silica

Nan Shen, Manyalibo J. Matthews, James E. Fair, Jerald A. Britten, Hoang T. Nguyen, Diane Cooke, Selim Elhadj, Steven T. Yang
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Volume:
256
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2010.01.073
File:
PDF, 866 KB
english, 2010
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