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Low energy repetitive miniature plasma focus device as high deposition rate facility for synthesis of DLC thin films
E. Ghareshabani, R.S. Rawat, R. Verma, S. Karamat, S. SobhanianVolume:
256
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2010.03.012
File:
PDF, 1.07 MB
english, 2010