Magnetron sputtering of epitaxial ZrB 2...

physica status solidi (a) 2014 / 03 Vol. 211; Iss. 3

Magnetron sputtering of epitaxial ZrB 2 thin films on 4H-SiC(0001) and Si(111)

Tengdelius, Lina, Birch, Jens, Lu, Jun, Hultman, Lars, Forsberg, Urban, Janzén, Erik, Högberg, Hans
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Volume:
211
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201330308
Date:
March, 2014
File:
PDF, 611 KB
english, 2014
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