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Effects of oxygen content and postdeposition annealing on the physical and electrical properties of thin Sm2O3 gate dielectrics
Tung-Ming Pan, Chun-Chin HuangVolume:
256
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.apsusc.2010.05.048
File:
PDF, 571 KB
english, 2010