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Electron density modulation in an asymmetric bipolar pulsed dc magnetron discharge
S. K. Karkari, A. R. Ellingboe, C. Gaman, I. Swindells, J. W. BradleyYear:
2007
Language:
english
DOI:
10.1063/1.2783980
File:
PDF, 577 KB
english, 2007