High-conductive nanocrystalline silicon with phosphorous...

Applied Surface Science 2010 Vol. 257; Iss. 4

High-conductive nanocrystalline silicon with phosphorous and boron doping

Chao Song, Jun Xu, Guran Chen, Hongcheng Sun, Yu Liu, Wei Li, Ling Xu, Zhongyuan Ma, Kunji Chen
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Volume:
257
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2010.08.065
File:
PDF, 897 KB
english, 2010
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