Surface cleaning procedures for thin films of indium gallium nitride grown on sapphire
K. Douglass, S. Hunt, A. Teplyakov, R.L. OpilaVolume:
257
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2010.08.074
File:
PDF, 634 KB
english, 2010