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Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process
Ji-Hoon Kang, Kwang-Seop Kim, Kyung-Woong KimVolume:
257
Year:
2010
Language:
english
Pages:
11
DOI:
10.1016/j.apsusc.2010.08.096
File:
PDF, 2.91 MB
english, 2010