Focused-ion-beam writing of electrical connections into...

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Focused-ion-beam writing of electrical connections into platinum oxide films

F. Machalett, K. Edinger, L. Ye, J. Melngailis, T. Venkatesan, M. Diegel, K. Steenbeck
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Year:
2000
Language:
english
DOI:
10.1063/1.125945
File:
PDF, 736 KB
english, 2000
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