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Preparation of silicon oxycarbide films by laser ablation of SiO/3C–SiC multicomponent targets
C.B. Wang, T. Goto, R. Tu, L.M. ZhangVolume:
257
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2010.08.127
File:
PDF, 668 KB
english, 2010