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Differing morphologies of textured diamond films with electrical properties made with microwave plasma chemical vapor deposition
Wen Chi Lai, Yu-Shiang Wu, Hou-Cheng Chang, Yuan-Haun LeeVolume:
257
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2010.09.006
File:
PDF, 1.23 MB
english, 2010