Comparative x-ray reflectometry and atomic force microscopy...

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Comparative x-ray reflectometry and atomic force microscopy of surfaces with non-Gaussian roughness

V. L. Mironov, O. G. Udalov, B. A. Gribkov, A. A. Fraerman
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Year:
2008
Language:
english
DOI:
10.1063/1.2977753
File:
PDF, 634 KB
english, 2008
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