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Ti/TiN multilayer thin films deposited by pulse biased arc ion plating
Yanhui Zhao, Guoqiang Lin, Jinquan Xiao, Hao Du, Chuang Dong, Lijun GaoVolume:
257
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2010.10.042
File:
PDF, 455 KB
english, 2011