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UV laser-induced high resolution cleaving of Si wafers for micro–nano devices and polymeric waveguide characterization
R. Casquel, M. Holgado, J.J. García-Ballesteros, K. Zinoviev, C. Férnandez-Sánchez, F.J. Sanza, C. Molpeceres, M.F. Laguna, A. Llobera, J.L. Ocaña, C. DomínguezVolume:
257
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2010.11.021
File:
PDF, 717 KB
english, 2011