![](/img/cover-not-exists.png)
Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition
Yu-Yun Chen, Jin-Cherng Hsu, Paul W. Wang, Yao-Wei Pai, Chih-Yuan Wu, Yung-Hsin LinVolume:
257
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2010.11.043
File:
PDF, 499 KB
english, 2011