Characteristics of PVD-CrAlSiN films after post-coat heat...

Applied Surface Science 2011 Vol. 257; Iss. 8

Characteristics of PVD-CrAlSiN films after post-coat heat treatments in nitrogen atmosphere

Wei-Yu Ho, Cheng-Hsun Hsu, Chi-Wei Chen, Da-Yung Wang
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Volume:
257
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2010.11.137
File:
PDF, 1.47 MB
english, 2011
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