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Influence of TaCl5 partial pressure on texture structure of TaC coating deposited by chemical vapor deposition
Zhao-Ke Chen, Xiang Xiong, Ying LongVolume:
257
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2010.11.172
File:
PDF, 1.63 MB
english, 2011