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Characterization of a nanometer-thick sputtered polytetrafluoroethylene film
Lei Li, Paul M. Jones, Yiao-Tee HsiaVolume:
257
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.apsusc.2010.12.104
File:
PDF, 1.01 MB
english, 2011